Greeneich, James: search on Z-Library

The world's largest scientific articles store. 70,000,000+ articles for free.

Don't use scam websites

1

SPIE Proceedings [SPIE 1989 Microlithography Conferences - San Jose, CA (Monday 27 February 1989)] Optical/Laser Microlithography II - Progress in I-line Stepper Technology for Half-Micron

Greeneich, James, Wittekoek, Steve, Katz, Barton, van den Brink, Martin, Lin, Burn J.

Year:

1989

Language:

english

File:

PDF, 15.15 MB

english, 1989

2

SPIE Proceedings [SPIE Microlithography 2000 - Santa Clara, CA (Sunday 27 February 2000)] Optical Microlithography XIII - Overlay performance in advanced processes

Bornebroek, Frank, Burghoorn, Jaap, Greeneich, James S., Megens, Henry J. L., Satriasaputra, Danu, Simons, Geert, Stalnaker, Sunny, Koek, Bert, Progler, Christopher J.

Year:

2000

Language:

english

File:

PDF, 465 KB

english, 2000

3

Developer Characteristics of Poly-(Methyl Methacrylate) Electron Resist

Greeneich, James S.

Journal:

Journal of The Electrochemical Society

Year:

1975

Language:

english

File:

PDF, 648 KB

english, 1975

4

Time evolution of developed contours in poly-(methyl methacrylate) electron resist

Greeneich, James S.

Journal:

Journal of Applied Physics

Year:

1974

Language:

english

File:

PDF, 676 KB

english, 1974

5

Efficient continuum sources for x-ray lithography

Greeneich, James S.

Journal:

Applied Physics Letters

Year:

1975

Language:

english

File:

PDF, 487 KB

english, 1975

6

Solubility Rate of Poly-(Methyl Methacrylate), PMMA, Electron-Resist

Greeneich, James S.

Journal:

Journal of The Electrochemical Society

Year:

1974

Language:

english

File:

PDF, 277 KB

english, 1974

7

SPIE Proceedings [SPIE Micro92 - San Jose, CA (Monday 9 March 1992)] Optical/Laser Microlithography V - Evaluation of high-numerical-aperture wide-field steppers for 0.35-micron design rules

Katz, Barton A., Greeneich, James S., Rogoff, Richard, Slonaker, Steve D., Wittekoek, Stefan, Luehrmann, Jr., Paul F., van den Brink, Martin A., Ritchie, Douglas R., Cuthbert, John D.

Year:

1992

Language:

english

File:

PDF, 2.48 MB

english, 1992

8

SPIE Proceedings [SPIE Micro - DL tentative - San Jose, CA (Friday 1 March 1991)] Electron-Beam, X-Ray, and Ion-Beam Submicrometer Lithographies for Manufacturing - Advanced lithographic methods for contact patterning on severe topography

Chu, Ronfu, Greeneich, James S., Katz, Barton A., Lin, Hwang-Kuen, Huang, Dong-Tsair, Peckerar, Martin C.

Year:

1991

Language:

english

File:

PDF, 531 KB

english, 1991

9

SPIE Proceedings [SPIE Microlithography '90, 4-9 Mar, San Jose - San Jose, CA (Sunday 4 March 1990)] Optical/Laser Microlithography III - High-numerical-aperture I-line stepper

Katz, Barton A., Greeneich, James S., Bigelow, Mark G., Katz, Ann, van Hout, Frits J., Coolsen, Jos F., Pol, Victor

Year:

1990

Language:

english

File:

PDF, 1.63 MB

english, 1990

10

SPIE Proceedings [SPIE 1988 Microlithography Conferences - Santa Clara, CA, United States (Wednesday 2 March 1988)] Optical/Laser Microlithography - Resolution And Overlay Of Submicron I-Line Wafer Steppers

Greeneich, James, Wittekoek, Steve, van den Brink, Martin, Katz, Barton, Coolsen, Jos, Lin, Burn J.

Year:

1988

Language:

english

File:

PDF, 10.89 MB

english, 1988